Home / Study Materials / KTU B.Tech S6 Lecture Notes  VLSI

KTU B.Tech S6 Lecture Notes  VLSI

KTU B.Tech S6 Lecture Notes  VLSI

KTU B.Tech S6 Lecture Notes EC304 VLSI

MODULE I

 

MODULE II

 

 

KTU B.Tech S6 Lecture Notes  VLSI

KTU B.Tech S6 Lecture Notes EC304 VLSI

MODULE I

 

Material Preparation- Purification, Crystal growth (CZ and FZ process), wafer preparation

 

Thermal Oxidation- Growth mechanisms, Dry and Wet oxidation

 

Deal Grove model.

 

Diffusion- Fick‘s Laws, Diffusion with constant surface concentration and from a constant source, diffusion techniques.

 

Ion implantation-Technique, Range Theory, annealing.

 

MODULE II

 

Epitaxy : Vapour phase epitaxy and molecular beam epitaxy

 

Lithography- Photo lithographic sequence, Electron Beam Lithography, Etching and metal deposition

 

Methods of isolation Circuit component fabrication: transistor, diodes, resistors, capacitors, N-well CMOS IC Fab

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